As the main equipment for obtaining, improving and maintaining the vacuum environment, dry vacuum pumps are widely used in semiconductor, panel display, solar photovoltaic, LED lighting, lithium batteries, medical devices and other fields.
In various semiconductor processes, it is mainly used in clean and demanding processes such as single crystal drawing, load-lock, etching, CVD, atomic layer deposition (ALD), packaging, and testing.
Vacuum pumps are also one of the key components of photovoltaic equipment. Photovoltaic cells are mainly divided into four processes: silicon material process, silicon wafer process, battery cell process and component process. Vacuum pumps are mainly used in silicon wafer crystal drawing, high square resistance diffusion of solar cells (low pressure diffusion furnace) and PVD and PECVD coating processes, component lamination links, etc. The vacuum stability in the equipment is one of the key technologies for process stability.
As vacuum technology has become more and more demanding in the field of production and scientific research, the scope of its application has become wider and wider, which has triggered the structural transformation of the vacuum pump industry and the dynamic changes in user needs. Based on the basic technology of existing dry-type vacuum pumps on the market, Keruida Intelligent has developed a new type of high-vacuum dry-type screw vacuum pump, which can significantly improve the shortcomings of existing vacuum pump technology and improve efficiency and service life.
Dry pumps can provide a longer service life in harsh processes, which can significantly improve efficiency. Innovative sealing technology can extend the life of the process, reduce the risk of leakage, and enhance corrosion resistance.

1. Semiconductor industry: it is used in wafer manufacturing, thin film deposition, chemical vapor deposition and other processes in the semiconductor industry to extract residual gases and impurities, manufacture liquid crystal displays, etch, and produce plasma CVD processes.
2. Solar photovoltaic industry: it is used in the production process of solar panels to remove impurities and odors from the production process.
3. Medical and pharmaceutical industry: In the pharmaceutical and medical fields, it is used in sterilization, distillation, freeze-drying and purification processes to help maintain a highly clean environment and stable pressure.
4. Distillation, drying, defoaming, packaging, etc. in the chemical industry and food industry.
5. Laboratory scientific research industry: used in physics, chemistry, materials, life sciences and other fields, such as heat treatment, thin film deposition, surface treatment, etc.

1. New design concept, higher efficiency, low failure rate and easy maintenance；
2. Microcomputer control module, support remote client monitoring；
3. Good sealing, not easy to wear, reliable operation and easy maintenance；
4. Advanced corrosion resistance technology to improve operation quality and life；
5. The exhaust path is short, the structure is simple, and the reactants are easy to discharge, reducing the deposition of reactants.；
6. Advanced dust treatment function can provide higher reliability and extend the service life of the pump.；
7. Strong compatibility and can be applied to various host computers for supporting use；
8. Perfect design and manufacturing technology to achieve low vibration and low noise operation.