Chemical diaphragm pumps also play an important role in semiconductor wet cleaning/etching processes. The acid supply, circulation and waste discharge process sections in the cleaning equipment all require the use of diaphragm pumps, while the etching equipment needs to transport media such as organic solvents. Since the cleaning equipment is non-standard equipment, the number of pumps used varies depending on the size of the equipment. Generally, there are about 5-10 pumps per equipment.