Note: 1.Ambient temperature: -10℃~+50℃; 2. Ambient humidity: below 90% (condensation of anhydrous beads); 3. Equipment site: no strongly corrosive gases and dust; 4. Vibration intensity: below 0.5g (acceleration); 5. The baking temperature of the pump body: ≤100℃; 6. Cooling water temperature: ≤25℃, cooling water pressure: 0.1-0.2MPa, flow rate≥1 L/min; 7. Choice of cooling method: air cooling can be used when the ambient temperature is 5-32℃; water cooling is required when the ambient temperature is ≥32℃, and water cooling is used when the air inlet diameter is greater than 200mm.; 8. The inlet pressure of the composite molecular pump for continuous work should be ≤5Pa (0.05mbar), and the pressure of the exhaust port of the pre-stage is required to be kept below 10Pa (0.1mbar).; 9. When selecting the type, a reasonable pre-stage pump (generally a rotary vane pump) must be configured, and a matching KRD molecular pump controller must be used. 10. The pumping speed in the table is the parameter value represented by nitrogen; in principle, a vacuum system of 10-4Pa does not need to be baked, and a vacuum system of 10-6Pa requires baking. |