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Compound Molecular Pump

Compound Molecular Pump

Molecular pump is a kind of high-speed rotating momentum-type vacuum acquisition equipment. In the molecular flow state, gas molecules collide with high-speed moving surfaces to obtain momentum in a certain direction, so that the gas molecules are compressed step by step and finally removed. The working pressure range is usually between 10-1Pa~10-7Pa, which is an important vacuum equipment to achieve high vacuum and ultra-high vacuum.

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  • Overview

    Molecular pump is a kind of high-speed rotating momentum-type vacuum acquisition equipment. In the molecular flow state, gas molecules collide with high-speed moving surfaces to obtain momentum in a certain direction, so that the gas molecules are compressed step by step and finally removed. The working pressure range is usually between 10-1Pa~10-7Pa, which is an important vacuum equipment to achieve high vacuum and ultra-high vacuum.
    Molecular pumps generally have two structural forms, one is a turbomolecular pump composed of dynamic and static blades, and the other is a composite molecular pump composed of a turbine stage and a traction stage. The characteristic of the composite molecular pump is that the pumping speed of the high-pressure zone of the molecular pump has been improved, and the outlet withstand pressure has also been improved, which can appropriately reduce the specifications of the pre-stage pump and save investment.
    According to the different bearing lubrication methods, molecular pumps have two types of oil lubrication and grease lubrication. Under normal circumstances, the oil-lubricated molecular pump can only be installed vertically, and the grease-lubricated molecular pump can be installed at any angle.
    The new generation of composite grease-lubricated molecular pump products launched by Suzhou Keruida are completely designed and optimized for industrial vacuum and scientific research fields. According to the air inlet diameter, there are mainly 100mm, 160mm, 200mm, 250mm and other mainstream application products, the pumping speed ranges from 110L/s to 2000L/s.The scope of s covers a total of 11 product types in 4 categories.

  • Main Features

    Fast start-up speed, wide working range, low operating power consumption, high cleanliness, simple maintenance and operation;
    Precision bearings: grease-lubricated precision ceramic ball bearings, which can be installed at any angle;
    Reliable products: integrated processing and molding of turbine rotors, high-speed motor drive;
    Diverse functions: complete accessories, customized solutions can be provided;
    Adjustable speed: to meet the needs of customers for a variety of pumping speeds;

  • Application Area

    Suitable for industrial coatings such as PVD, CVD, LCD flat panel, glass coating, optical coating, conductive glass, etc.;
    Mass spectrometry, high-energy physics, vacuum degassing, vacuum leak detection, vacuum metallurgy, electric vacuum devices;
    Semiconductor, photovoltaic solar cell manufacturing, and other fields of vacuum technology;
    Scientific research fields such as medicine and biological engineering, environmental simulation, etc.;

Specifications

复合分子泵.png

Technical Parameters

TypeLubricationBearing

Molecular pump series model

Air inlet diameter

(mm)


Air intake interface and standard

Exhaust interface

Rated pumping speed

(L/s)

Ultimate pressure

(≤P)

Rated speed

(rpm)

Drive power supply

Communication method

Power input

Mounting angle

Weight

(kg)

Recommended pre-stage pump

(L/s)

Selection notes

Compound molecular pump

Turbine level

Traction grade


Grease

Precision ceramic bearings

CMP-100/110100

IS0-K100

CF100

KF251106*10-642300120W

RS232, RS48515-pin D-type interface

AC

200-240V

3P-50Hz

Any82

Q-Inflation protection

S-standard water cooling

F-air-cooled pump

K-impact resistant type

N-corrosion resistant type


GreaseCMP-100/1501502*10-651000150WAny92
GreaseCMP-100/3003002*10-651000300WAny112
OilCMP-160/500160

IS0-K160

CF160

KF405006*10-627000750WVertical294-8
OilCMP-160/6206006*10-627000750WVertical294-8
GreaseCMP-160/7007006*10-636000750WAny234-8
OilCMP-200/1200200

IS0-K200

CF200

KF4012006*10-624000750WVertical3915
GreaseCMP-200/130013006*10-624000750WAny33
15
OilCMP-250/1500250

IS0-K250

CF250

KF5015006*10-621000750WVertical6015
OilCMP-250/160016006*10-627000750WVertical4715
GreaseCMP-250/200020006*10-624000750WAny4715

Note:

1.Ambient temperature: -10℃~+50℃;               

2. Ambient humidity: below 90% (condensation of anhydrous beads);

3. Equipment site: no strongly corrosive gases and dust; 

4. Vibration intensity: below 0.5g (acceleration);

5. The baking temperature of the pump body: ≤100℃;                

6. Cooling water temperature: ≤25℃, cooling water pressure: 0.1-0.2MPa, flow rate≥1 L/min;

7. Choice of cooling method: air cooling can be used when the ambient temperature is 5-32℃; water cooling is required when the ambient temperature is ≥32℃, and water cooling is used when the air inlet diameter is greater than 200mm.;

8. The inlet pressure of the composite molecular pump for continuous work should be ≤5Pa (0.05mbar), and the pressure of the exhaust port of the pre-stage is required to be kept below 10Pa (0.1mbar).;

9. When selecting the type, a reasonable pre-stage pump (generally a rotary vane pump) must be configured, and a matching KRD molecular pump controller must be used.

10. The pumping speed in the table is the parameter value represented by nitrogen; in principle, a vacuum system of 10-4Pa does not need to be baked, and a vacuum system of 10-6Pa requires baking.

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